Product Description
99.7%Al2O3 Alumina substrate as a high purity material and the large size new material, it has excellent physical properties and stable chemical characters, the good price compare with other materials. High purity alumina is always continued developing by the global top research and advanced ceramics and fine ceramic factories. Farcera 99.7%Alumina Ceramics series products mostly used in semi-conductive industry as the grinding panel of CMP process, Large size long alumina ceramic substrate used in LCD industry and lithography as the ceramic panel.
Here we introduce Chemshun high purity 99.7% Alumina wafer/sapphire polishing plate used in CMP process of semi-conductive industry.
Application:
As the Alumina ceramic wafer polishing and sapphire lapping disks used in the semi-conductive, diamond polishing etc.
Process: All types of Polishing and lapping process, such as CMP chemical mechanical polishing, Mechanical Polishing, Precision Polishing.
Feature:
High purity and chemical durability
High Mechanical Strength and Hardness
High Corrosion Resistance
High Voltage Resistance
High Temperature Resistant Up to 1700ºC
Extremely Abrasion Resistance Performance
Excellent Insulation Performance
All type of Size 180,360, 450, 600mm etc
Detailed Photos
Product Parameters
| Product name |
99.7 high purity Alumina ceramic Polishing Lapping Discs |
| Material |
99.7% alumina |
| Normal Size |
D180, 360, 450, 600mm, customized size accepted. |
| Color |
Ivory |
| Application |
Wafer and Sapphire CMP process in semi-conductive industry |
| Min.Order |
1Pic |
| |
|
Unit |
99.7 Alumina Ceramics |
| General Properties |
Al2O3 content |
wt% |
99.7-99.9 |
| Density |
gm/cc |
3.94-3.97 |
| Color |
- |
Ivory |
| Water absorption |
% |
0 |
| Mechanical Properties |
Flexural Strength(MOR) 20 ºC |
Mpa(psix10^3) |
440-550 |
| Elastic Modulus 20ºC |
GPa (psix10^6) |
375 |
| Vickers Hardness |
Gpa(kg/mm2) R45N |
>=17 |
| Bending Strength |
Gpa |
390 |
| Tensile Strength 25ºC |
MPa(psix10^3) |
248 |
| Fracture Toughness (K I c) |
Mpa* m^1/2 |
4-5 |
| Thermal Properities |
Thermal conductivity(20ºC) |
W/mk |
30 |
| Coefficient of Thermal expansion(25-1000ºC) |
1x 10^-6/ºC |
7.6 |
| Thermal Shock Resistance |
ºC |
200 |
| Maximum use temperature |
ºC |
1700 |
| Electrical Properities |
Dielectric Strength (1MHz) |
ac-kv/mm(ac v/mil) |
8.7 |
| Dielectric Constant(1 MHz) |
25ºC |
9.7 |
| Volume Resistivity |
ohm-cm (25ºC) |
>10^14 |
| ohm-cm (500ºC) |
2x10^12 |
| ohm-cm (1000ºC) |
2x10^7 |
We accept custom orders.
If you want to know more product information, welcome to contact us!
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